Company Filing History:
Years Active: 2016-2017
Title: Seok-Yun Kim: Innovator in Semiconductor Technology
Introduction
Seok-Yun Kim, a prominent inventor based in Yongin-si, South Korea, has made significant contributions to the field of semiconductor technology. With three patents to his name, his work focuses on advanced methods for depositing insulating films and thin films critical to semiconductor manufacturing.
Latest Patents
Among the latest patents held by Seok-Yun Kim is a method for depositing an insulating film on a recessed portion that has a high aspect ratio. This innovative process involves several steps including:
1. An insulation layer deposition step using a silicon precursor to form an insulating layer in trenches of high aspect ratios (5:1 or more).
2. Purge steps to remove unreacted materials and byproducts.
3. A densification step utilizing plasma atmosphere created by applying radio frequency (RF) power between 400 kHz to 2 MHz to enhance the quality of the insulation layer.
Another notable patent involves a cyclic deposition method for thin films, which details a systematic procedure for depositing silicon on targets within a chamber. This method improves the efficiency of oxide formation and includes purging operations and a plasma processing operation using nitrogen to optimize the materials involved.
Career Highlights
Seok-Yun Kim works at Eugene Technology Co., Ltd., where he continues to push the boundaries of semiconductor technology through his research and innovations. His expertise has positioned him as a key contributor in the field, particularly in semiconductor device manufacturing.
Collaborations
Collaborating with notable colleagues such as Hai-Won Kim and Chang-Hun Shin, Seok-Yun Kim has been part of a forward-thinking team dedicated to developing cutting-edge technologies that enhance manufacturing processes and semiconductor performance.
Conclusion
Seok-Yun Kim's innovations reflect a deep understanding of semiconductor manufacturing and the intricate processes behind it. His patents not only contribute to the advancement of technology but also position him as a notable figure in the field of electronics engineering. As the industry evolves, his work will continue to play a vital role in shaping future developments in semiconductor technology.