Company Filing History:
4 out of 993 
2 out of 5,553 
Years Active: 2004-2011
Title: The Innovative Contributions of Senzi Li
Introduction
Senzi Li is a notable inventor based in San Jose, California. He has made significant contributions to the field of semiconductor manufacturing, particularly in cleaning processes following etching. With a total of 4 patents to his name, his work has advanced the efficiency and effectiveness of device structure cleaning.
Latest Patents
One of Senzi Li's latest patents is a method for post-etch cleans. This invention provides methods for performing a cleaning process that enhances cleaning efficiency while minimizing damage to device structures. The process begins with a first plasma clean, which may consist of multiple steps. Following this, a first HO based clean is executed, which can be a de-ionized water rinse, a water vapor clean, or a plasma clean that includes hydrogen and oxygen. After the first HO based clean, a second plasma clean is performed, again potentially comprising multiple steps. This is followed by a second HO based clean, which may also be a de-ionized water rinse, a water vapor clean, or a plasma clean with hydrogen and oxygen. The invention is particularly useful after various etching processes, such as metal etch or polysilicon etch, and allows for photoresist removal at low temperatures.
Career Highlights
Senzi Li has worked with prominent companies in the semiconductor industry, including Novellus Systems Incorporated and STMicroelectronics S.r.l. His experience in these organizations has contributed to his expertise in the field and has allowed him to develop innovative solutions for complex manufacturing challenges.
Collaborations
Throughout his career, Senzi Li has collaborated with talented individuals, including David L. Chen and Yuh-Jia (Jim) Su. These collaborations have fostered an environment of innovation and have led to the development of advanced technologies in semiconductor manufacturing.
Conclusion
Senzi Li's contributions to the field of semiconductor manufacturing through his innovative cleaning processes have made a significant impact. His patents reflect a commitment to enhancing efficiency and reducing damage in device structures. His work continues to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.