This inventor holds 2 USPTO granted patents. Top assignee: Sony Corporation. Active years: 1999.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Yamaguchi, JP (1999)
- Kanagawa, JP (1999)
Company Filing History:
Years Active: 1999
Title: Seiichirou Miyata: Innovator in Semiconductor Technology
Introduction
Seiichirou Miyata is a prominent inventor based in Yamaguchi, Japan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative spirit and technical expertise.
Latest Patents
Miyata's latest patents include a static electricity chuck and a wafer stage. The static electricity chuck is designed to vary the temperature of a wafer quickly without adversely affecting throughput. It features a dielectric member made of insulating material, an electrode positioned beneath the dielectric member, and a heater located below the electrode to heat the dielectric member. The wafer stage incorporates this static electricity chuck on a metal jacket equipped with a cooling apparatus.
Additionally, his wafer stage for manufacturing semiconductor devices allows for a plasma process under high-temperature conditions, particularly at 400 degrees Celsius or more. This innovation utilizes improved electrostatically chucking technology, enhancing temperature controllability. The wafer stage consists of an electrostatic chuck and a temperature-adjusting jacket made from a composite aluminum-based material, which includes a temperature-adjusting means.
Career Highlights
Seiichirou Miyata is currently employed at Sony Corporation, where he continues to push the boundaries of semiconductor technology. His work has been instrumental in advancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Miyata has collaborated with notable coworkers, including Shinsuke Hirano and Kinya Miyashita. Their combined expertise has contributed to the successful development of innovative technologies in the semiconductor field.
Conclusion
Seiichirou Miyata's contributions to semiconductor technology through his patents and work at Sony Corporation highlight his role as a key innovator in the industry. His advancements in temperature control and electrostatic chucking technology are paving the way for future developments in semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile