Company Filing History:
Years Active: 2017-2018
Title: Sehn Thach: Innovator in Semiconductor Technology
Introduction
Sehn Thach is a notable inventor based in Union City, CA (US), recognized for his contributions to semiconductor technology. With a total of 2 patents, Thach has made significant advancements in the field, particularly in the design and functionality of electrostatic chucks.
Latest Patents
Thach's latest patents include a "High temperature electrostatic chuck with real-time heat zone regulating capability." This invention provides electrostatic chucks that operate effectively at elevated temperatures. One embodiment features a dielectric chuck body that includes a substrate supporting plate with a top surface for receiving a substrate and a back surface opposing it. An embedded electrode and a hollow shaft facilitate temperature control, ensuring optimal performance during semiconductor processing.
Another significant patent is the "Method of processing a substrate support assembly." This invention outlines a method and apparatus for preparing new and used substrate support assemblies for semiconductor processing environments. The method involves coating the substrate support assembly with a protective material while maintaining a temperature of less than or equal to 150° C. This innovation enhances the durability and efficiency of semiconductor components.
Career Highlights
Sehn Thach is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on developing advanced technologies that improve semiconductor manufacturing processes. Thach's expertise and innovative mindset have positioned him as a valuable asset in his field.
Collaborations
Throughout his career, Thach has collaborated with talented individuals such as Dmitry Lubomirsky and Jennifer Y Sun. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies in semiconductor processing.
Conclusion
Sehn Thach's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor. His innovative solutions continue to shape the future of semiconductor manufacturing.
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