Company Filing History:
Years Active: 1995-2004
Title: Scott Edward Beck: Innovator in Chemical Vapor Deposition Technologies
Introduction
Scott Edward Beck is a notable inventor based in Kutztown, PA (US). He has made significant contributions to the field of chemical vapor deposition (CVD) technologies, holding a total of 6 patents. His work focuses on enhancing the adhesion of copper films and developing low dielectric constant interlayer dielectric films.
Latest Patents
One of his latest patents is titled "Halogen addition for improved adhesion of CVD copper to barrier." This process describes a method for depositing a copper film on a substrate surface through chemical vapor deposition of a copper precursor. The process involves treating a diffusion barrier layer surface and/or a deposited film with an adhesion-promoting agent, followed by annealing the copper film to the substrate. The suitable adhesion-promoting agents include organic halides such as methylene chloride, diatomic chlorine, diatomic bromine, diatomic iodine, HCl, HBr, and HI. The processes outlined in this invention provide copper-based films with a predominant (111) texture, enhancing adhesion between the diffusion barrier layer and the copper film.
Another significant patent is "Organosilicon precursors for interlayer dielectric films with low dielectric constants." This method involves forming a low dielectric constant interlayer dielectric film on a substrate by reacting an organosilicon precursor under chemical vapor deposition conditions. The resulting interlayer dielectric film has a dielectric constant of 3.5 or less, showcasing the effectiveness of the method.
Career Highlights
Scott Edward Beck is currently employed at Air Products and Chemicals, Inc., where he continues to innovate in the field of chemical vapor deposition. His work has contributed to advancements in materials science and semiconductor technology.
Collaborations
Throughout his career, Scott has collaborated with notable colleagues, including Ralph J Ciotti and Eugene Joseph Karwacki, Jr. These collaborations have further enriched his research and development efforts.
Conclusion
Scott Edward Beck is a prominent inventor whose work in chemical vapor deposition technologies has led to significant advancements in the field. His innovative patents demonstrate his commitment to improving material properties and processes, making a lasting impact on the industry.
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