Scott E White

Title: The Innovative Mind of Scott E. White

Introduction

Scott E. White, based in Rochester, NY, is an accomplished inventor known for his impactful contributions to the field of plasma technology. With a focus on improving the efficiency and effectiveness of plasma processes, his pioneering work has garnered recognition within the industry.

Latest Patents

One of Scott E. White's notable patents is the "Method for ion mass separation and ion energy control in process plasmas." This innovative invention addresses a critical aspect of plasma ion energy distribution by managing the relationship between a base RF frequency and a harmonic RF frequency. By modulating these RF power frequencies, the characteristics of the plasma process can be tailored based on the ion mass. This technology allows for selective etching, enabled by distinguishing between lighter and heavier ions. Additionally, it enhances atomic layer etching processes, offering the flexibility to switch between layer modification and layer etch steps through precise frequency adjustments within the same gas phase of the plasma.

Career Highlights

Scott is currently employed at Tokyo Electron Limited, a leading global supplier of semiconductor production equipment. His tenure at the company has placed him at the forefront of innovation in his field, allowing him to leverage his extensive knowledge and expertise in plasma technology to drive advancements in semiconductor manufacturing.

Collaborations

Throughout his career, Scott has collaborated with talented professionals, including Yusuke Yoshida and Sergey Alexandrovich Voronin. Together, they have worked towards achieving greater efficiencies and breakthroughs in plasma processes, contributing significantly to the advancements in their respective areas of research and development.

Conclusion

Scott E. White is a distinguished inventor whose innovative approaches to plasma technology continue to shape the industry. His patent for ion mass separation and energy control is a testament to his dedication to enhancing semiconductor manufacturing processes. With his ongoing contributions and collaborations, Scott remains a key figure in the realm of technological advancements.