Company Filing History:
Years Active: 2009-2011
Title: Scott Alan Anderson: Innovator in Quartz Etching Technology
Introduction
Scott Alan Anderson is a notable inventor based in Livermore, California. He has made significant contributions to the field of semiconductor processing, particularly in quartz etching technology. With a total of 4 patents to his name, Anderson has demonstrated a commitment to advancing the capabilities of photomask fabrication.
Latest Patents
Anderson's latest patents include innovative methods for etching quartz. One of his notable inventions is a method for quartz photomask plasma etching. This method involves providing a filmstack in an etching chamber, where a quartz layer is partially exposed through a patterned layer. The process includes the use of fluorocarbon process gases and biasing the quartz layer with power pulses of less than 600 Watts to achieve precise etching through a patterned mask. This technique is particularly beneficial for fabricating photomasks with etched quartz portions.
Another significant patent is for a cluster tool with an integrated metrology chamber for transparent substrates. This invention relates to a method and apparatus for measuring etch depth in a semiconductor photomask processing system. The process includes etching a transparent substrate in an etch chamber, transferring it to a measurement cell, and measuring etch depth or critical dimensions using a specialized measurement tool.
Career Highlights
Scott Alan Anderson is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on enhancing the efficiency and accuracy of photomask processing systems. Anderson's expertise in quartz etching has positioned him as a key player in the development of advanced semiconductor technologies.
Collaborations
Anderson has collaborated with notable colleagues such as Ajay Kumar and Richard Lewington. These partnerships have contributed to the successful development of innovative technologies in the semiconductor field.
Conclusion
Scott Alan Anderson's contributions to quartz etching technology have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in photomask fabrication. Anderson's work exemplifies the importance of innovation in technology development.