Takasaki, Japan

Satoru Yoshida


Average Co-Inventor Count = 4.6

ph-index = 1

Forward Citations = 23(Granted Patents)


Company Filing History:


Years Active: 2001-2003

where 'Filed Patents' based on already Granted Patents

3 patents (USPTO):

Title: Satoru Yoshida: Innovator in Polymer Chemistry

Introduction

Satoru Yoshida is a prominent inventor based in Takasaki, Japan. He has made significant contributions to the field of polymer chemistry, particularly in the development of materials for resist applications in lithography. With a total of 3 patents, his work has been instrumental in enhancing the performance of resist materials.

Latest Patents

Yoshida's latest patents include a process for preparing a polymer compound for resist. This innovative process improves the performance of the resist, enhancing heat resistance, sensitivity, and resolution without causing film loss or deterioration of the polymer's dry etching resistance. The method involves dissolving a styrene-based monomer, including a 4-acetoxystyrene monomer, and a dimethyl-2,2′-azobiscarboxylate ester in a solvent, followed by polymerization and hydrolysis.

Another notable patent is related to a novolak type phenol resin, specifically designed for forming resist patterns. This resin is produced by reacting vinylphenol with specific compounds to achieve a weight average molecular weight between 2,000 and 20,000. The resulting novolak type phenol resin offers excellent pattern shape, heat resistance, resolution, and sensitivity, making it suitable for lithographic applications.

Career Highlights

Yoshida is currently associated with Gun Ei Chemical Industry Co., Ltd., where he continues to innovate in the field of polymer chemistry. His work has garnered attention for its practical applications in the semiconductor industry, particularly in the production of high-quality resist materials.

Collaborations

Yoshida has collaborated with notable colleagues, including Katsuhiro Maruyama and Satoru Kitano. These collaborations have further enriched his research and development efforts, leading to advancements in polymer technology.

Conclusion

Satoru Yoshida's contributions to polymer chemistry and resist technology have established him as a key figure in the field. His innovative patents and ongoing work at Gun Ei Chemical Industry Co., Ltd. continue to influence the industry positively.

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