Company Filing History:
Years Active: 1998-2004
Title: Satohiro Okayama: Innovator in Substrate Processing Technology
Introduction
Satohiro Okayama is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 3 patents. His innovative work focuses on improving the efficiency and yield of substrate processing systems.
Latest Patents
Okayama's latest patents include a substrate processing device, a substrate conveying device, and a substrate processing method. The substrate processing method allows for the simultaneous conveyance of an unprocessed substrate to a film-processing chamber while a processed substrate is moved to a substrate preparation chamber. This innovation reduces the substrate processing cycle and increases the yield per unit time. The substrate preparation chamber features a two-tiered structure designed to accommodate both processed and unprocessed substrates. Additionally, a two-tiered transfer robot enables the simultaneous removal or placement of substrates into the preparation and processing chambers, further decreasing the cycle time for substrate processing.
Another notable patent is the substrate processing apparatus, which consists of an outer tank, an inner tank, and opposed electrodes. The inner tank is designed to completely confine plasma, with the distance between the opposed electrodes adjustable. This design enhances the efficiency of the substrate processing apparatus.
Career Highlights
Satohiro Okayama is currently employed at Kokusai Electric Co., Ltd., where he continues to develop innovative technologies in substrate processing. His work has significantly impacted the industry, leading to advancements in processing efficiency and yield.
Collaborations
Okayama collaborates with talented colleagues, including Atsuhiko Suda and Motoichi Kanazawa. Their combined expertise fosters a creative environment that drives innovation in substrate processing technologies.
Conclusion
Satohiro Okayama's contributions to substrate processing technology exemplify his commitment to innovation and efficiency. His patents reflect a deep understanding of the challenges in the industry and provide solutions that enhance productivity.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.