Company Filing History:
Years Active: 2019
Title: **Innovator Spotlight: Sarina Wunderlich**
Introduction
Sarina Wunderlich, a talented inventor based in Oberkochen, Germany, has made significant strides in the field of optical engineering. With a focus on enhancing lithography technology, she holds one patent that illustrates her innovative approach to solving complex engineering challenges.
Latest Patents
Sarina's notable patent is titled "Faceted mirror for EUV projection lithography and illumination optical unit with same." This innovative facet mirror is designed for extreme ultraviolet (EUV) projection lithography, featuring multiple facets that effectively reflect EUV illumination light. Some of these facets function as alignment facets, possessing a reflection surface aligned along two distinct coordinates of the overall facet arrangement. A distinctive feature of this design is the varied curvature of the reflection surface along two axes, tilted at a finite angle relative to the alignment coordinates. This ingenious configuration results in increased EUV throughput, particularly beneficial for the extended operation of projection exposure apparatuses equipped with her invention.
Career Highlights
Sarina currently works at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and technology. Her role allows her to apply her inventive prowess in advancing optical solutions that cater to the semiconductor industry. Her contributions reflect a blend of technical mastery and innovative thinking that stands out in her field.
Collaborations
Working alongside her colleague Thomas Fischer, Sarina collaborates on projects that push the boundaries of current optical technology. Their joint efforts exemplify the impact of teamwork in achieving groundbreaking results in engineering and technology.
Conclusion
Sarina Wunderlich is a shining example of innovation in optical engineering. Her patent on the faceted mirror for EUV projection lithography highlights her commitment to enhancing technological capabilities within the industry. As she continues her work at Carl Zeiss SMT GmbH, her contributions are likely to inspire future innovations, pushing the envelope of what is possible in optical technology.