Santos Mayo

Title: Santos Mayo - Innovator in Integrated Circuit Technology

Introduction

Santos Mayo is a notable inventor based in Rockville, MD (US). He has made significant contributions to the field of integrated circuit technology, particularly in the extraction of overlay information from semiconductor wafers. His innovative approach addresses challenges posed by optically concealed features in integrated circuits.

Latest Patents

Santos Mayo holds a patent for a method titled "Target configuration and method for extraction of overlay vectors from." This patent describes a technique for extracting overlay information from a target of an integrated circuit wafer. The method involves scanning a target with an electron beam of sufficient energy to penetrate an overlying opaque planarized film. The architecture of the target includes a resist feature on the planarized film and an embedded electron backscattering target feature beneath it. The electrons backscattered from the conductive first-level target feature are detected, and a signal profile is generated to extract overlay information.

Career Highlights

Santos Mayo is associated with the Government of the United States of America, as represented by the Secretary of Commerce. His work has been instrumental in advancing the understanding and capabilities of integrated circuit technology.

Collaborations

Santos has collaborated with notable colleagues, including Michael W. Cresswell and Jeremiah R. Lowney. Their combined expertise has contributed to the success of various projects in the field.

Conclusion

Santos Mayo's innovative work in integrated circuit technology exemplifies the importance of advancements in this field. His contributions continue to influence the development of semiconductor technologies.