This inventor holds 1 USPTO granted patent and 2 published patent applications. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Sangsu Yeh - Innovator in Semiconductor Processing Technology
Introduction
Sangsu Yeh is an inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor processing technology. Although he currently holds no granted patents, his innovative ideas are reflected in his latest patent applications.
Latest Patent Applications
Sangsu Yeh's latest patent applications include two notable inventions. The first is a semiconductor process equipment that features a wafer support with multiple support areas. This equipment includes a processor that receives measurement data from defined measurement areas on the wafer. It calculates representative data and error data, determining final control data based on predetermined ranges. The second application is for a semiconductor processing system that consists of multiple chambers for plasma-based semiconductor processes. This system incorporates Optical Emission Spectroscopy (OES) apparatuses that detect light emitted from plasma, generating OES data. The processor in this system corrects the OES data and calculates a process representing variable (PRV), enhancing the reliability of the semiconductor processing system.
Conclusion
Sangsu Yeh's work in semiconductor processing technology showcases his innovative spirit and dedication to advancing the field. His latest patent applications reflect his commitment to improving semiconductor processes and systems.