This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2019.
Company Filing History:
Years Active: 2019
Title: Sangdong Kwon: Innovator in Electrostatic Chuck Technology
Introduction
Sangdong Kwon is a notable inventor based in Seoul, South Korea. He has made significant contributions to the field of substrate processing technology. His innovative work has led to the development of a patented electrostatic chuck assembly.
Latest Patents
Sangdong Kwon holds a patent for an "Electrostatic Chuck Assembly and Substrate Processing Apparatus Including the Same." This invention discloses an electrostatic chuck assembly designed to support a substrate within a substrate processing apparatus. The apparatus features a process chamber that includes a gas supply unit for introducing process gas, a top electrode section for generating plasma, and the electrostatic chuck assembly positioned below the top electrode. The assembly consists of an electrostatic chuck, a focus ring, an electrode ring made from a different material, and a brazed bonding layer that connects the focus ring and electrode ring.
Career Highlights
Sangdong Kwon is currently employed at Samsung Electronics Co., Ltd., where he continues to advance his research and development efforts. His work at Samsung has positioned him as a key player in the innovation of substrate processing technologies.
Collaborations
Sangdong collaborates with talented colleagues, including Jaehyun Lee and Tae-Hwa Kim. Their combined expertise contributes to the success of their projects and innovations.
Conclusion
Sangdong Kwon's contributions to electrostatic chuck technology exemplify the impact of innovative thinking in the field of substrate processing. His patent and ongoing work at Samsung Electronics Co., Ltd. highlight his role as a significant inventor in this area.