Company Filing History:
Years Active: 2014
Title: The Innovative Contributions of Sang Q Le
Introduction
Sang Q Le is a notable inventor based in San Jose, California. He has made significant contributions to the field of vapor deposition technology, particularly in the development of apparatuses for depositing tungsten-containing materials. His work is characterized by a focus on enhancing the efficiency and effectiveness of deposition processes.
Latest Patents
Sang Q Le holds a patent for a "Temperature controlled lid assembly for tungsten nitride deposition." This invention provides apparatuses for vapor depositing tungsten-containing materials, such as metallic tungsten and tungsten nitride. The processing chamber includes a lid assembly with a lid plate, a showerhead, a mixing cavity, a distribution cavity, and a resistive heating element. The resistive heating element is designed to maintain the lid plate at a temperature range from about 120° C. to about 180° C., with optimal temperatures between 140° C. and 160° C. This innovation allows for the effective deposition of both metallic tungsten and tungsten nitride materials through chemical vapor deposition (CVD) processes.
Career Highlights
Sang Q Le is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His role involves advancing technologies that are critical to the manufacturing processes of electronic devices. His expertise in vapor deposition has positioned him as a key contributor to the company's innovative projects.
Collaborations
Sang Q Le has collaborated with notable colleagues, including Avgerinos V Gelatos and Sang-Hyeob Lee. These collaborations have fostered a productive environment for innovation and have led to advancements in their respective fields.
Conclusion
Sang Q Le's contributions to the field of vapor deposition technology exemplify the impact of innovative thinking in the semiconductor industry. His patent for a temperature-controlled lid assembly highlights his commitment to improving manufacturing processes. Through his work at Applied Materials, Inc., he continues to drive advancements that shape the future of technology.