Sang-o Park

Title: Innovations of Sang-o Park in Semiconductor Manufacturing

Introduction

Sang-o Park is a prominent inventor based in Osan, South Korea, known for his significant contributions to the field of semiconductor manufacturing. With a total of 10 patents to his name, he has developed innovative methods and compositions that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

Among his latest patents, Sang-o Park has introduced a method of manufacturing semiconductor devices, which includes the formation of tungsten or polysilicon plugs while minimizing the step-height of the intermediate insulating layer. This method involves forming a tungsten film on an insulating layer and burying contact holes, followed by spin-etching the tungsten film using a specific etching composition. The etching composition comprises various oxidants and enhancers, ensuring that the tungsten film remains only within the contact holes. Additionally, he has developed an etching composition that facilitates the manufacturing process by allowing for precise control over the conductive layer during the etching process.

Career Highlights

Sang-o Park's career is marked by his association with Samsung Electronics Co., Ltd., where he has played a crucial role in advancing semiconductor technology. His innovative approaches have not only contributed to the company's success but have also set new standards in the industry.

Collaborations

Throughout his career, Sang-o Park has collaborated with notable colleagues, including Kyung-seuk Hwang and Kwang-shin Lim. These collaborations have fostered a creative environment that has led to groundbreaking advancements in semiconductor manufacturing.

Conclusion

Sang-o Park's work in semiconductor manufacturing exemplifies the spirit of innovation and dedication to advancing technology. His patents and methods continue to influence the industry, showcasing the importance of research and development in creating efficient semiconductor devices.