Sang-lock Hah

Title: Innovations by Sang-lock Hah in Semiconductor Technology

Introduction

Sang-lock Hah is a notable inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on improving the manufacturing processes of semiconductor devices, which are crucial for modern electronics.

Latest Patents

One of Sang-lock Hah's latest patents is a method of manufacturing a semiconductor capacitor that incorporates a hemispherical grain layer using a dry cleaning process. This innovative method involves forming a polysilicon layer on a specific material layer of a semiconductor substrate. The process includes etching the polysilicon layer to create a polysilicon pattern, which is then dry cleaned using hydrogen in a plasma state and a fluorine-based gas. This cleaning method enhances the reliability of the semiconductor device by effectively removing contaminants without damaging the hemispherical grain layer.

Another significant patent by Hah is a method for removing contaminants from integrated circuit substrates using specialized cleaning solutions. This method treats the substrate with a hydrogen peroxide cleaning solution that contains a chelating agent, followed by treatment with hydrogen gas and fluorine-containing gas. The cleaning solutions utilized include ammonium, hydrogen peroxide, deionized water, and various chelating agents, ensuring a thorough cleaning process that maintains the integrity of the substrate.

Career Highlights

Sang-lock Hah is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to contribute to advancements in semiconductor technology, which is vital for the development of various electronic devices.

Collaborations

Throughout his career, Hah has collaborated with esteemed colleagues such as Seung-Pil Chung and Kyu-hwan Chang. These collaborations have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Sang-lock Hah's contributions to semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing the field. His work not only enhances the manufacturing processes but also improves the reliability of semiconductor devices, making a significant impact on the electronics industry.