Sang Lim Kim

Title: Sang Lim Kim and Advances in Plasma-Based Substrate Processing.

Introduction

Sang Lim Kim is an inventor based in Cheonan, South Korea, whose patent work concerns plasma-based substrate processing. His disclosed inventions address treatment equipment maintenance and process reliability. He is associated with Semes Co., Ltd., and has 2 patents.

Latest Patents

Kim’s latest patents describe methods for processing substrates in apparatuses that generate plasma in a treatment or processing space using microwaves.

“Method of Treating Substrate” outlines a cycle that includes plasma treatment, replacement of an apparatus component after a preset number of treatments, and a subsequent backup operation. The backup includes a bake purge to remove byproducts from the replaced component.

“Apparatus for Processing Substrate and Method of Processing Substrate” describes a related sequence of plasma treatment, component replacement, and equipment backup. Before the bake purge removes impurities, the apparatus preheats the processing space by increasing the temperature of the coolant supplied to the process chamber.

Career Highlights

Kim’s patent disclosures focus on coordinating substrate treatment with equipment upkeep. By incorporating component replacement, preheating, and bake-purge steps into the processing sequence, the inventions address the removal of byproducts and impurities from substrate-processing equipment.

Collaborations

Kim’s listed coworkers include Hyun Kyu Choi and Do Hwan Jung. His work is associated with Semes Co., Ltd.

Conclusion

Sang Lim Kim’s patents center on plasma-based substrate processing and maintenance procedures designed to help prepare equipment for continued operation.