Sang Heon Song

Title: The Innovative Contributions of Sang Heon Song

Introduction

Sang Heon Song is a notable inventor based in San Jose, California. He has made significant contributions to the field of plasma technology, particularly through his innovative patent. His work is recognized within the industry, and he is associated with Lam Research Corporation.

Latest Patents

Sang Heon Song holds a patent for a "Compact High Density Plasma Source." This invention features an RF antenna that, when powered, inductively generates plasma in a process region of a chamber. The design includes an array of parallel conductive lines oriented along a plane, consisting of four conductive lines. The configuration allows for specific current flows in adjacent lines, enhancing the efficiency of plasma generation.

Career Highlights

Throughout his career, Sang Heon Song has demonstrated a commitment to advancing plasma technology. His work at Lam Research Corporation has positioned him as a key player in the development of innovative solutions in this field. His patent reflects his expertise and dedication to improving industrial processes.

Collaborations

Sang Heon Song has collaborated with notable colleagues, including Roger Patrick and Neil M P Benjamin. These partnerships have contributed to the successful development and implementation of advanced technologies in their respective projects.

Conclusion

Sang Heon Song's contributions to plasma technology through his patent and work at Lam Research Corporation highlight his role as an influential inventor. His innovative approach continues to impact the industry positively.