This inventor holds 4 USPTO granted patents and 2 EPO patents. Top assignee: Brewer Science, Inc.. Active years: 2008-2013.
Company Filing History:
Years Active: 2008-2013
Title: Innovations of Sam X Sun
Introduction
Sam X Sun is a notable inventor based in Rolla, MO (US). He has made significant contributions to the field of microelectronics, holding a total of 4 patents. His work focuses on advanced methods for patterning hardmask layers, which are crucial in the fabrication of microelectronic devices.
Latest Patents
One of his latest patents is titled "On-track process for patterning hardmask by multiple dark field exposures." This invention provides methods for creating via or trench structures on a developer-soluble hardmask layer using a multiple exposure-development process. The hardmask layer is patterned while the imaging layer is developed. After the imaging layer is stripped using organic solvents, the same hardmask can be further patterned using subsequent exposure-development processes. Eventually, the pattern can be transferred to the substrate using an etching process.
Another significant patent is "Method of creating photolithographic structures with developer-trimmed hard mask." This patent presents novel, developer-soluble hard mask compositions and methods for using those compositions to form microelectronic structures. The composition includes a compound for controlling the development rate and a crosslinking agent in a solvent system. The methods involve applying the composition to a substrate and curing it. An imaging layer is then applied, followed by light exposure and developing, during which the light-exposed portions of the imaging layer are removed, along with adjacent portions of the hard mask composition. The size of the hard mask composition structures is controlled by the development rate, yielding feature sizes that are a fraction of the imaging layer feature sizes, allowing for a pattern that can ultimately be transferred to the substrate.
Career Highlights
Sam X Sun is currently employed at Brewer Science, Inc., where he continues to innovate in the field of microelectronics. His work has been instrumental in advancing the techniques used in the industry.
Collaborations
Some of his notable coworkers include Hao Xu and Tony D Flaim, who contribute to the collaborative environment at Brewer Science, Inc.
Conclusion
Sam X Sun's contributions to microelectronics through his innovative patents and collaborative efforts highlight his importance in the field. His work continues to influence the development of advanced microelectronic structures.