Company Filing History:
Years Active: 2025
Title: Innovations by Sam Jafarian Tehrani
Introduction
Sam Jafarian Tehrani is an accomplished inventor based in King City, Oregon. He has made significant contributions to the field of substrate processing technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of processing chambers used in various applications.
Latest Patents
One of his latest patents is titled "Process module chamber providing symmetric RF return path." This invention includes a multi-station processing chamber with a top plate and a bottom portion that encloses stations, each featuring a pedestal assembly. A spindle, centrally located between the stations, is designed to rotate about a central axis and is electrically connected to the bottom portion. An actuator controls the spindle's movement in the Z-direction, while an indexer connected to the spindle rotates with it, facilitating substrate transfer. The invention also features an electrically conductive interface that provides an RF return path, enhancing the overall functionality of the processing chamber.
Another notable patent is the "Automated showerhead tilt adjustment." This invention introduces an automated tilting system that adjusts the orientation of a component within a substrate processing chamber. The system comprises at least one tilt adjustment motor that cooperates with the component, allowing for precise control over its orientation. This innovation aims to improve the efficiency of substrate processing by ensuring optimal positioning of components.
Career Highlights
Sam Jafarian Tehrani is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop and refine technologies that are critical to the manufacturing processes of semiconductors.
Collaborations
Throughout his career, Sam has collaborated with notable colleagues, including John Wiltse and Bryan Anthony Cmelak. These collaborations have contributed to the advancement of technologies in the field of substrate processing.
Conclusion
Sam Jafarian Tehrani's innovative contributions to substrate processing technology demonstrate his expertise and commitment to advancing the industry. His patents reflect a deep understanding of the complexities involved in processing chambers, making him a valuable asset to Lam Research Corporation.