Seoul, South Korea

Sae-hoon Chung


Average Co-Inventor Count = 5.0

ph-index = 2

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 2005-2006

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2 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Sae-hoon Chung in Layer-by-Layer Etching Technologies

Introduction

Sae-hoon Chung is a talented inventor based in Seoul, South Korea, recognized for his significant contributions to the field of etching technologies. With a total of two patents to his name, he has made strides in the development of precision etching methods that enhance the manufacturing processes used in various technological applications.

Latest Patents

One of Sae-hoon Chung's latest inventions is the "Layer-by-layer etching apparatus using neutral beam and method of etching using the same." This advanced technology allows for the control of etching depth at an atomic level, providing unprecedented precision in material processing. The apparatus operates by precisely controlling the supply of etching gas and the irradiation of a neutral beam, minimizing damage during the etching process. The detailed method involves loading a substrate in a reaction chamber, where the etching gas is supplied and adsorbed onto the exposed layer. Any excessive etching gas is subsequently removed, followed by the irradiation of the neutral beam, which effectively removes the generated etch by-products.

Career Highlights

Sae-hoon Chung serves as an esteemed researcher at Sungkyunkwan University, where his work at the intersection of academia and technology has been influential. His innovative approaches in etching technology not only advance scientific knowledge but also hold potential for various industrial applications.

Collaborations

Throughout his career, Sae-hoon Chung has collaborated with notable colleagues, including Geun-Young Yeom and Min-jae Chung. These partnerships have fostered a community of innovation, allowing for the cross-pollination of ideas and techniques in the research and development of cutting-edge technologies.

Conclusion

Sae-hoon Chung's contributions to layer-by-layer etching technologies exemplify the impact of innovative thinking in the field of material science. His patents not only reflect his expertise but also pave the way for advancements in precision engineering, enhancing the capabilities of various industries reliant on fine etching processes. As he continues to work at Sungkyunkwan University, his future endeavors promise to drive further innovations in this vital area of research.

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