Location History:
- Kagoshima, JP (1999)
- Kokubu, JP (1992 - 2000)
Company Filing History:
Years Active: 1992-2000
Title: **Saburo Nagano: Innovator in Wafer Technology**
Introduction
Saburo Nagano, based in Kokubu, Japan, is an accomplished inventor with a significant contribution to the field of semiconductor technology. With five patents to his name, he has developed innovative solutions that enhance the performance of wafer handling and processing.
Latest Patents
Nagano's latest patents include advanced designs for wafer holding and support members. One notable invention is a wafer holding member that integrates a ceramic base body with a heating resistor or electrodes for electrostatic adhesion and plasma generation. This design minimizes thermal expansion and improves resistance to corrosive halogenic gases. The materials used in the heating resistor include a composition of tungsten, molybdenum, tungsten carbide, titanium carbide, and titanium nitride mixed with aluminum nitride, ensuring high performance under operational conditions.
Another important patent is for a wafer support member, which consists of a ceramic base that is 3 mm thick and includes a metallic electrode plate. This plate is functional both as a plasma-generating electrode when subjected to high frequency voltage and as an electrostatic attraction electrode when direct-current high voltage is applied. Additionally, his inventions include a wafer holding device that supports semiconductor wafers and glass substrates, incorporating resistance heating elements for effective thermal management.
Career Highlights
Saburo Nagano has built his career at Kyocera Corporation, a prominent player in the technology and electronics sector. His work has focused on the development of sophisticated materials and structures that advance the capabilities of wafer processing technologies, making him a valued asset to his organization.
Collaborations
Throughout his career, Nagano has collaborated with notable colleagues, including Kazuhiro Kuchimachi and Yasunori Kawanabe. Together, they have pushed the boundaries of innovation in their field, fostering advancements that contribute to the efficiency and reliability of semiconductor manufacturing processes.
Conclusion
Saburo Nagano's contributions to wafer technology illustrate his commitment to innovation and excellence. His patents not only reflect his expertise but also the potential they hold for transforming the semiconductor industry. As technology continues to evolve, inventors like Nagano play a crucial role in paving the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.