S Sohail Naqvi

Title: Innovations of S Sohail Naqvi

Introduction

S Sohail Naqvi is an accomplished inventor based in Albuquerque, NM (US). He has made significant contributions to the field of optical technologies, holding a total of 4 patents. His work focuses on enhancing the evaluation and optimization of photoresist materials used in lithography.

Latest Patents

One of his latest patents is titled "Use of diffracted light from latent images in photoresist for optimizing." This invention includes a method and apparatus for the rapid, nondestructive evaluation of the contrast of a latent image in a photoresist. The contrast of the latent image is directly monitored by measuring the intensity of the light diffracted from a pattern in the exposed, undeveloped photoresist known as the latent image. The proper exposure tool parameters, such as exposure tool time and focus, are suitably determined based on the intensity of different orders of diffracted light, particularly the 2nd-order diffracted from the latent image. In a preferred embodiment, a test pattern consisting of a periodic pattern or a pattern of the device associated with the particular lithographic step is employed to provide well-defined diffraction orders.

Another notable patent is for a "Lens scatterometer system employing source light beam scanning means." This optical scatterometer system enables illumination of a sample material at various angles of incidence without rotating or otherwise moving the sample material.

Career Highlights

Throughout his career, S Sohail Naqvi has worked with various companies, including Bio-Rad Laboratories, Inc. His innovative approaches have contributed to advancements in optical measurement technologies.

Collaborations

He has collaborated with notable professionals in his field, including John R McNeil and Kirt C Hickman. Their joint efforts have furthered the development of technologies related to photoresist evaluation and optimization.

Conclusion

S Sohail Naqvi's contributions to the field of optical technologies through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in the industry.