Ryo Matsuhashi

Title: Ryo Matsuhashi: Innovator in Plasma Processing Technology

Introduction

Ryo Matsuhashi is a notable inventor based in Eden Prairie, MN (US). He has made significant contributions to the field of plasma processing technology. His innovative work focuses on enhancing the efficiency and longevity of plasma processing apparatuses.

Latest Patents

Matsuhashi holds a patent for a "Plasma processing apparatus and device manufacturing method." This invention aims to reduce damage from plasma generated in a discharge vessel while extending the replacement cycle of the discharge vessel. The apparatus features a processing chamber that partitions a processing space, a discharge vessel with one end open to the processing chamber, and an antenna that generates an induced electric field to create plasma under reduced pressure. Additionally, an electromagnet forms a divergent magnetic field within the discharge vessel, contributing to the overall effectiveness of the apparatus.

Career Highlights

Matsuhashi is associated with Canon Anelva Corporation, where he has been instrumental in advancing plasma processing technologies. His work has garnered attention for its innovative approach to improving device manufacturing methods.

Collaborations

Matsuhashi has collaborated with notable colleagues, including Hiroshi Akasaka and Yoshimitsu Kodaira. Their combined expertise has contributed to the development of cutting-edge technologies in the field.

Conclusion

Ryo Matsuhashi's contributions to plasma processing technology exemplify the impact of innovation in device manufacturing. His patent reflects a commitment to enhancing efficiency and reducing damage in processing apparatuses.