This inventor holds 2 USPTO granted patents and 2 published patent applications. Top assignee: Lam Research Corporation. Active years: 2024-2026.
Company Filing History:
Years Active: 2024-2026
Title: Roy Scott Powell: Innovator in Substrate Processing Technology
Introduction
Roy Scott Powell is a notable inventor based in Campbell, CA (US). He has made significant contributions to the field of substrate processing technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and precision of substrate handling systems.
Latest Patents
Powell's latest patents include innovative systems designed to improve the transfer and alignment of edge rings in substrate processing. The first patent, titled "Edge ring transfer with automated rotational pre-alignment," describes a system that utilizes a robot to transfer either a substrate or an edge ring. This system features a substrate aligner that adjusts the rotational position of the substrate or edge ring relative to the robot's end effector. The robot retrieves a carrier plate that supports the edge ring and transfers both components to the substrate aligner.
The second patent, "Automated transfer of edge ring requiring rotational alignment," outlines a ring storage station that delivers consumable parts to a substrate processing system. This station includes a housing with a base plate and a rotating plate, featuring an end-effector opening and a service window opening. The design incorporates finger support structures that align consumable parts using index pins, ensuring precise rotational alignment between the ring storage and the process module.
Career Highlights
Roy Scott Powell is currently employed at Lam Research Corporation, where he continues to develop innovative solutions for substrate processing. His expertise in automation and alignment technologies has positioned him as a key contributor to advancements in the industry.
Collaborations
Throughout his career, Powell has collaborated with talented individuals such as Darryl Angelo and Damon Tyrone Genetti. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Roy Scott Powell's contributions to substrate processing technology through his patents and work at Lam Research Corporation highlight his role as an influential inventor in the field. His innovative systems are paving the way for more efficient and precise substrate handling processes.