This inventor holds 2 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2002-2003.
Company Filing History:
Years Active: 2002-2003
Title: Roy Edwards: Innovator in Semiconductor Processing
Introduction
Roy Edwards is a notable inventor based in Los Gatos, CA (US). He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of electro-chemical deposition techniques.
Latest Patents
One of Roy Edwards' latest patents is an electro-chemical deposition cell designed for face-up processing of single semiconductor substrates. This invention provides an apparatus and method for electro-chemically depositing a uniform metal layer onto a substrate. The apparatus includes a cathode connected to the substrate plating surface, an anode positioned above the substrate support member, and an electroplating solution inlet that fluidly connects the anode and the substrate plating surface. Additionally, the invention features a dual catch-cup system that separates the electroplating solution and rinse solutions during processing, ensuring efficient re-circulation of the different solutions.
Another patent by Roy Edwards also focuses on an electro-chemical deposition cell for face-up processing of semiconductor substrates. This invention comprises a substrate support member, a cathode connected to the substrate plating surface, and an anode that supplies the electroplating solution. The anode is designed with a consumable metal source within a liquid permeable structure, and it works in conjunction with a cavity ring to hold and distribute the electroplating solution effectively. The substrate support member is equipped with vacuum ports to provide suction during processing and features rotation and vibration capabilities to enhance the electro-deposition process.
Career Highlights
Roy Edwards is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work has significantly impacted the development of advanced manufacturing processes for semiconductor devices.
Collaborations
Throughout his career, Roy has collaborated with notable colleagues, including Yezdi N Dordi and Joe Stevens. These collaborations have contributed to the advancement of technologies in the semiconductor field.
Conclusion
Roy Edwards is a distinguished inventor whose work in electro-chemical deposition has paved the way for innovations in semiconductor processing. His patents reflect a commitment to improving manufacturing techniques, making him a valuable asset to the industry.