Santa Clara, CA, United States of America

Roja Palakodeti


Average Co-Inventor Count = 8.0

ph-index = 1

Forward Citations = 10(Granted Patents)


Company Filing History:


Years Active: 2013

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1 patent (USPTO):Explore Patents

Title: The Innovative Contributions of Roja Palakodeti

Introduction

Roja Palakodeti is a prominent inventor based in Santa Clara, CA. She has made significant contributions to the field of vapor deposition processes, particularly through her innovative patent. Her work is instrumental in advancing technologies that involve the treatment of processing chambers.

Latest Patents

Roja Palakodeti holds a patent for an "In-situ chamber treatment and deposition process." This invention provides a method for treating the inner surfaces of a processing chamber and depositing materials during vapor deposition processes, such as atomic layer deposition (ALD) or chemical vapor deposition (CVD). The process involves exposing the inner surfaces of the processing chamber and the substrate to a reagent, such as a hydrogenated ligand compound, during a pretreatment process. This innovative approach enhances the efficiency and effectiveness of the deposition process.

Career Highlights

Roja Palakodeti is currently employed at Applied Materials, Inc., where she continues to develop and refine her innovative ideas. Her expertise in vapor deposition processes has positioned her as a valuable asset in her field. With a focus on improving processing techniques, she has contributed to advancements that benefit various applications in technology.

Collaborations

Some of her notable coworkers include Paul F Ma and Joseph F AuBuchon. Their collaborative efforts contribute to the innovative environment at Applied Materials, Inc., fostering advancements in technology and research.

Conclusion

Roja Palakodeti's contributions to the field of vapor deposition processes exemplify her innovative spirit and dedication to advancing technology. Her patent and work at Applied Materials, Inc. highlight her role as a leading inventor in her field.

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