Company Filing History:
Years Active: 2001-2006
Title: The Innovative Contributions of Rodney G. Smedt
Introduction
Rodney G. Smedt, located in Los Gatos, California, is a notable inventor with a portfolio of five patents in the field of semiconductor technology. His groundbreaking work has significantly impacted how semiconductor wafers are inspected and handled, showcasing his expertise and creativity in engineering and design.
Latest Patents
Among his latest innovations, two stand out prominently:
1. **Backside Contamination Inspection Device**: This patent introduces a system designed to inspect both the front and back sides of semiconductor wafers simultaneously. By rotating the wafer and utilizing optical scanning, the system allows for the efficient detection of defects. The tilt in the wafer's supporting orientation ensures both sides can be examined concurrently by specialized inspection devices, enhancing the reliability of wafer quality control.
2. **Edge Handling Wafer Chuck**: This invention pertains to an edge handling chuck that maintains a semiconductor wafer's orientation during high-speed rotations. The innovative design utilizes spring-loaded edge clamps and incorporates a gas arrangement to stabilize the wafer against the effects of spinning vortex forces. This ensures the wafer remains flat and effectively manages the pressures experienced during rapid movement.
Career Highlights
Rodney’s contributions to semiconductor technology are realized in his role at KLA-Tencor Corporation, a leader in process control and yield management. Throughout his career, he has applied his extensive knowledge to develop advanced solutions that address key challenges within the industry, particularly in semiconductor manufacturing.
Collaborations
Rodney collaborates closely with his coworker, George L. Coad, contributing to innovations that push the boundaries of technology. Their teamwork reflects a shared commitment to advancing semiconductor inspection methods and improving manufacturing processes.
Conclusion
Rodney G. Smedt's inventions represent a significant advancement in semiconductor inspection technologies. His creativity and dedication to engineering innovation play an essential role in shaping the future of semiconductor manufacturing, making him a notable figure in the field.