Company Filing History:
Years Active: 1992-1993
Title: The Innovative Contributions of Robert W. Gordon
Introduction
Robert W. Gordon, an accomplished inventor based in Seattle, WA, has made significant strides in the field of semiconductor processing. With a total of three patents to his name, Gordon's inventions demonstrate his commitment to advancing technology in innovative ways.
Latest Patents
Among his latest patents, Gordon has developed a method for single wafer processing that revolutionizes the handling of semiconductor wafers. His single wafer processor is designed to support a semiconductor wafer which has at least one surface that requires contact with a fluid. This sophisticated equipment features a portable module equipped with a gripper assembly that can rotate around the axis of a portable housing, allowing it to mechanically engage or disengage the edge of an individual wafer. The system includes a receiving base with an open bowl that utilizes liquid jets to discharge processing liquids or reagents in parallel streams directed towards the rotating wafer’s outer surface. Additionally, the bowl is capable of immersion treatment, which enables the wafer to remain stationary or rotate at slow speeds. The portable unit is maneuvered between base units through a robotic arm, and measures have been taken to shield all holding elements to minimize contamination from environmental factors.
Career Highlights
Gordon's career is marked by his association with Semitool, Inc., where he has orchestrated pioneering developments in semiconductor processing technologies. His inventions not only enhance the efficiency of wafer handling but also contribute to the overall improvement in the semiconductor manufacturing process.
Collaborations
Throughout his journey, Robert W. Gordon has collaborated with notable peers, such as Raymon F. Thompson and Daniel L. Durado. These professional partnerships have further enriched the inventive output within the semiconductor sector, showcasing the value of teamwork in technological innovation.
Conclusion
The work of Robert W. Gordon exemplifies how targeted innovations in semiconductor processing can lead to meaningful advancements in the field. His patents reflect a deep understanding of both the technical challenges and opportunities within the industry, positioning him as a leader in the pursuit of efficient and effective semiconductor manufacturing solutions.