Company Filing History:
Years Active: 2003
Title: Robert V. Ellis: Innovating Silica Substrate Technology
Introduction
Robert V. Ellis, an accomplished inventor based in Albuquerque, NM, has contributed to the field of materials science with a significant patent. His innovations primarily focus on the engineering of silica substrates that enhance microfabrication processes. With one patent to his name, Ellis has showcased the potential of utilizing monocrystalline silicon substrates in creating high-quality silica.
Latest Patents
The patent titled "Silica substrate or portion formed from oxidation of monocrystalline silicon" reveals a groundbreaking method for generating an inclusion-free silica substrate. This technique involves oxidizing a monocrystalline silicon substrate entirely to convert it into silica. The oxidation is executed from both major surfaces of the silicon substrate, leveraging a conventional high-pressure oxidation system. The resulting product is an amorphous silica substrate that demonstrates superior etching characteristics compared to traditional fused silica substrates. Furthermore, this innovation permits the partial conversion of silicon substrates to silica, enabling the formation of optical access windows.
Career Highlights
Robert V. Ellis is associated with Sandia Corporation, where he applies his expertise in materials science to bring forth advancements in technology. His work at the corporation focuses on enhancing the capabilities of microfabrication through innovative substrate solutions.
Collaborations
Ellis has collaborated with notable colleagues, including Carolyn M. Matzke and Dennis J. Rieger. Through teamwork, they strive to push the boundaries of research and development, particularly in the domain of microfabrication materials.
Conclusion
Robert V. Ellis stands as a prominent figure in the innovation of silica substrate technology. His contributions, particularly his patent, reflect a deep understanding of materials science and a commitment to improving microfabrication techniques. With his ongoing work at Sandia Corporation and collaboration with esteemed professionals, Ellis continues to inspire advancements in the field.