Company Filing History:
Years Active: 1982-1989
Title: The Innovations of Robert R Joseph
Introduction
Robert R Joseph is a notable inventor based in Poughkeepsie, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on advancements in high-speed devices and composite insulator structures.
Latest Patents
One of his latest patents is for a high-speed GaAs MESFET having refractory contacts. This invention discloses a process for fabricating a MESFET that begins with a GaAs substrate covered with a shallow N- layer and nitride. A submicron-wide dummy gate mask is formed using multilayer organic and sidewall image transfer techniques. The process includes etching the nitride, forming N+ source/drain contacts through ion implantation, and depositing refractory metal for these contacts. The invention also details a high-temperature anneal process to activate the N+ regions and anneal the contact metal.
Another significant patent involves a composite insulator structure that separates adjacent layers of patterned metal on an LSI chip. This composite insulator consists of a relatively thick layer of sputtered oxide and a thin layer of plasma nitride. The thin layer is designed to be conformal, covering projections on the underlying metal and preventing interlevel shorting between the patterned layers.
Career Highlights
Robert R Joseph is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the capabilities of high-speed electronic devices.
Collaborations
Throughout his career, Robert has collaborated with notable colleagues, including Karanam Balasubramanyam and Robert B Renbeck. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Robert R Joseph's contributions to semiconductor technology through his patents and work at IBM highlight his role as a significant inventor in the field. His innovative approaches continue to influence advancements in high-speed devices and materials.