Robert R Allen, Deceased

Title: The Innovations of Robert R. Allen

Introduction

Robert R. Allen was a notable inventor whose contributions to the field of thin-film technology have left a lasting impact. Based in San Francisco, California, he held three patents during his career, showcasing his expertise and innovative spirit. His work primarily focused on enhancing the performance and efficiency of thin-film structures, particularly in applications such as active-matrix liquid crystal displays (AMLCDs).

Latest Patents

One of Allen's significant patents is for a thin-film structure with a conductive molybdenum-chromium line. This invention allows for a conductive line in a thin-film structure to be processed similarly to chromium while offering greater conductivity due to the inclusion of molybdenum. The conductive line can be produced through physical vapor deposition of a molybdenum-chromium alloy, which can then be masked and etched using photolithographic techniques. The proportions of molybdenum in the alloy can range from 15 to 85 atomic percent, providing a balance between ease of processing and conductivity.

Another notable patent by Allen involves a thin-film structure with a tapered feature. This innovation addresses step coverage problems by creating a feature with an edge that has a tapered sidewall profile. The feature is produced by varying local etch rates in the thickness direction of the layer, which can be achieved through physical vapor deposition. This method allows for precise control over the angle of elevation, enhancing the overall performance of the thin-film structure.

Career Highlights

Throughout his career, Robert R. Allen made significant strides in the field of thin-film technology while working at Xerox Corporation. His innovative approaches to conductive lines and tapered features in thin-film structures have contributed to advancements in display technologies. His work has been recognized for its technical merit and practical applications in the industry.

Collaborations

Allen collaborated with several talented individuals during his career, including Tzu-Chin Chuang and Jackson H. Ho. These collaborations helped to further enhance the quality and impact of his inventions.

Conclusion

Robert R. Allen's contributions to thin-film technology and his innovative patents have made a significant impact on the industry. His work continues to influence advancements in display technologies, showcasing the importance of innovation in engineering and design.