Robert Michael Hartung

Title: The Innovations of Robert Michael Hartung

Introduction

Robert Michael Hartung is a notable inventor based in Blaubeuren, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on innovative devices and methods that enhance the efficiency and effectiveness of semiconductor processes.

Latest Patents

One of Hartung's latest patents is a "Device for doping, deposition or oxidation of semiconductor material at low pressure." This invention provides a process tube equipped with a tube closure and devices for supplying and discharging process gases, as well as generating a negative pressure within the tube. The design ensures that the closure of the process chamber is gas-tight and vacuum-tight, allowing for improved operational efficiency.

Another significant patent is the "Method and apparatus for depositing chalcogens." This invention addresses the separation of chalcogens from waste gases in process installations. It ensures complete and reliable removal of chalcogens during nonstop operation, enhancing the overall effectiveness of the process installation.

Career Highlights

Throughout his career, Robert Michael Hartung has worked with prominent companies in the semiconductor industry, including Centrotherm Photovoltaics AG and Centrotherm Clean Solutions GmbH & Co. KG. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor technology.

Collaborations

Hartung has collaborated with notable professionals in his field, including Alexander Piechulla and Claus Rade. These partnerships have likely fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

Robert Michael Hartung's contributions to semiconductor technology through his patents and career achievements highlight his role as an influential inventor. His innovative devices and methods continue to impact the industry positively.