Location History:
- Gainesville, VA (US) (1985)
- Danbury, CT (US) (2000 - 2006)
Company Filing History:
Years Active: 1985-2006
Title: The Innovations of Robert M Merkling, Jr.
Introduction
Robert M Merkling, Jr. is a notable inventor based in Danbury, CT (US). He has made significant contributions to the field of chemical mechanical polishing (CMP) with a total of 4 patents to his name. His work primarily focuses on enhancing the efficiency and stability of polishing processes used in semiconductor manufacturing.
Latest Patents
Merkling's latest patents include innovative processes and slurries that utilize ceria-based materials. One of his key inventions involves the addition of silica to ceria-based CMP slurries. This enhancement allows the polish process to initiate much faster, effectively eliminating dead time and reducing process instability caused by variations in operating conditions. His patented slurry composition includes ceria particles with a concentration of 1.0–5.0 wt % and silica particles ranging from 0.1–5.0 wt %. The optimal ratio of ceria to silica is maintained between approximately 10:1 to nearly 1:1 by weight. Additionally, the ceria particles are sized between 150–250 nm, while the silica particles exceed 100 nm in size. The slurry is formulated to have a pH of approximately 9.0, making it suitable for various CMP applications.
Another significant patent involves a method for reconditioning polishing pads using a CMP apparatus. This method allows the polishing pad to contact a workpiece in the presence of a slurry, enhancing the overall polishing process. The reconditioning pad is made from a material similar to that of the polishing pad, ensuring compatibility and effectiveness.
Career Highlights
Merkling is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the field of semiconductor processing. His work has been instrumental in advancing CMP technologies, which are critical for the production of high-performance electronic devices.
Collaborations
Throughout his career, Merkling has collaborated with talented individuals such as David Stanasolovich and Rajasekhar Venigalla. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Robert M Merkling, Jr. is a distinguished inventor whose contributions to CMP processes have significantly impacted the semiconductor manufacturing landscape. His innovative approaches and collaborative efforts continue to drive advancements in this essential field.
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