Robert L Greene

Title: Innovations of Robert L Greene

Introduction

Robert L Greene is an accomplished inventor based in Fremont, CA. He has made significant contributions to the field of substrate support technology. With a total of 2 patents, Greene's work focuses on improving methods for dechucking substrates.

Latest Patents

Greene's latest patents include a "Method for Dechucking a Substrate" and a "Method and Apparatus for Dechucking a Substrate." Both inventions provide a substrate support assembly that enhances the efficiency of substrate handling. The support assembly features a substrate support with a support surface, a first set of lift pins, and additional lift pins that are movably disposed through the substrate support. In the actuated position, the first set of lift pins projects a longer distance from the support surface than the other lift pins. This innovative design allows for a more effective method of dechucking substrates, ensuring precision and reliability in the process.

Career Highlights

Greene is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display technology sectors. His work at Applied Materials has allowed him to develop and refine his inventions, contributing to advancements in substrate support technology.

Collaborations

Some of Greene's notable coworkers include Quanyuan Shang and William Reid Harshbarger. Their collaboration has likely fostered an environment of innovation and creativity, further enhancing the development of new technologies.

Conclusion

Robert L Greene's contributions to substrate support technology through his patents demonstrate his commitment to innovation in the field. His work continues to influence the industry and improve substrate handling processes.