Location History:
- Nethuen, MA (US) (1989)
- Andover, MA (US) (1990)
Company Filing History:
Years Active: 1989-1990
Title: Innovations by Robert E. Jennings
Introduction
Robert E. Jennings is a notable inventor based in Andover, MA, with a focus on advancements in clean room technology. He holds two patents that showcase his innovative contributions to the field.
Latest Patents
One of his latest patents is the Horizontal Laminar Air Flow Work Station. This invention features a load chamber equipped with a vertical air curtain that isolates the chamber from the general clean room environment. The horizontal air flows generated within the chamber effectively bathe wafers held horizontally, ensuring they are treated with filtered air. These air flows are recirculated by the air curtain, which can be driven by the clean room's air supply mechanism if desired.
Another significant patent is the Wafer Transfer System. This apparatus facilitates the horizontal transfer of a wafer between a cassette and an input station of a vacuum processing system. It includes a wafer transfer arm with a primary section linked to a secondary section, allowing for straight-line movement to a location and orientation station. The system determines the wafer's center and angular orientation, utilizing a solar cell to sense the wafer's position. Corrections are calculated and applied during the transfer to ensure accurate positioning at the input station.
Career Highlights
Robert E. Jennings has made substantial contributions to his field while working at Varian Associates, Inc. His work has significantly impacted the efficiency and effectiveness of wafer processing in clean room environments.
Collaborations
Throughout his career, Jennings has collaborated with notable colleagues, including Eric L. Mears and Richard John Hertel. Their combined expertise has contributed to advancements in clean room technology and wafer processing systems.
Conclusion
Robert E. Jennings is a distinguished inventor whose patents reflect his commitment to innovation in clean room technology. His work continues to influence the industry and improve processes related to wafer handling and processing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.