This inventor holds 3 USPTO granted patents. Top assignees: Applied Materials, Inc., Applied Material, Inc.. Active years: 1999-2003.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1999-2003
Title: The Innovations of Robert D Greenway
Introduction
Robert D Greenway is an accomplished inventor based in Sunnyvale, CA (US). He holds a total of 3 patents that showcase his expertise in the field of substrate support and gas feed-through technologies. His contributions have significantly impacted the industry, particularly in plasma chamber applications.
Latest Patents
One of his latest patents is titled "Substrate support with gas feed-through and method." This invention features a substrate support that includes an electrode and a dielectric layer covering the electrode. The dielectric layer has a surface designed to receive a substrate, while a gas feed-through provides gas to the surface of the dielectric layer. This innovative design includes a conduit that extends through the dielectric layer and electrode, along with a dielectric insert that allows gas to flow through a passage. Additionally, two opposing electrically conducting cups are positioned around the passage in the dielectric insert.
Another notable patent is "Chamber having improved gas feed-through and method." This invention focuses on a gas feed-through that supplies gas to a plasma chamber. It comprises a dielectric insert with a passage for gas flow and an electrically conducting cup surrounding a portion of the passage. The design of the electrically conducting cup is specifically shaped to minimize plasma formation within the gas feed-through.
Career Highlights
Throughout his career, Robert D Greenway has worked with prominent companies, including Applied Materials, Inc. His experience in these organizations has allowed him to refine his skills and contribute to significant advancements in technology.
Collaborations
Robert has collaborated with notable individuals in the field, including Richard Raymond Mett and Hamid Noorbakhsh. These partnerships have further enriched his work and innovations.
Conclusion
Robert D Greenway's contributions to the field of substrate support and gas feed-through technologies are noteworthy. His patents reflect a commitment to innovation and excellence in engineering.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile