This inventor holds 2 USPTO granted patents. Top assignee: Other. Active years: 1988.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
2 out of 834,570 Years Active: 1988
Title: Innovations by Robert A Coberly
Introduction
Robert A Coberly is an accomplished inventor based in Alta Loma, CA (US). He has made significant contributions to the field of cleaning and processing substrates, particularly semiconductor wafers. With a total of 2 patents, Coberly's work showcases his innovative approach to solving complex problems in substrate handling.
Latest Patents
Coberly's latest patents include an "Apparatus for cleaning, rinsing and drying substrates." This invention features a cleaning tank equipped with one or more megasonic transducers. These transducers are designed to direct megasonic energy past the substrates for effective cleaning. The substrates are held in place by an improved holder that can pivot, allowing both sides of the substrates to be exposed to the megasonic energy field. Adjacent to the cleaning tank is a rinse tank that contains a rinse solution, which can be heated or maintained at ambient temperature. A robotic transfer arm mechanism facilitates the movement of substrates from the cleaning tank to the rinse tank, ensuring they emerge in a dry state without the need for an independent dryer.
Career Highlights
Throughout his career, Robert A Coberly has focused on developing advanced technologies for substrate cleaning and processing. His innovative designs have improved efficiency and effectiveness in the semiconductor industry. Coberly's patents reflect his commitment to enhancing the quality and reliability of substrate handling processes.
Collaborations
Coberly has collaborated with notable professionals in his field, including Mark Jonathan Beck and Dan S Azlin. These partnerships have contributed to the development and refinement of his innovative technologies.
Conclusion
Robert A Coberly's contributions to the field of substrate cleaning and processing are noteworthy. His innovative patents demonstrate a deep understanding of the challenges faced in the semiconductor industry. Coberly's work continues to influence advancements in substrate handling technologies.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile