Company Filing History:
Years Active: 1990-1998
Title: Innovations by Robert A. Casella
Introduction
Robert A. Casella is a notable inventor based in Salem, MA, who has made significant contributions to the field of gas delivery systems and particle beam processing. With a total of two patents to his name, his work has advanced the technology used in various applications, particularly in the semiconductor industry.
Latest Patents
One of Casella's latest patents is focused on gas delivery systems for particle beam processing. This invention describes an apparatus and method for an improved gas delivery system that effectively delivers reactant material to a workpiece, such as a substrate, being operated on by a particle beam. The system employs a shroud-type concentrator with an interior axial passage, allowing fluid reactant material to be supplied directly to the axial passage for delivery to the workpiece. The particle beam can traverse this passage, enabling concurrent impingement on the workpiece surface along with the reactant delivery.
Another significant patent by Casella involves particle beam shielding. This apparatus allows both an ion beam and an electron beam to travel toward a predetermined region of a substrate surface during the sputter etching and imaging of insulating and other targets. It prevents deflection of the electron beam caused by stray electrostatic fields on the substrate surface. The design includes a metal shield with a funnel-shaped portion leading to an orifice, through which the finely focused ion beam and the electron beam pass to the target. Additionally, the shield supports a gas injection needle that injects gas through the orifice toward the predetermined region.
Career Highlights
Robert A. Casella is currently associated with Micrion Corporation, where he continues to innovate and develop advanced technologies. His work has been instrumental in enhancing the efficiency and effectiveness of particle beam processing techniques.
Collaborations
Throughout his career, Casella has collaborated with notable colleagues, including Charles J. Libby and Gary P. Rathmell. These collaborations have contributed to the advancement of technologies in their respective fields.
Conclusion
Robert A. Casella's contributions to the field of gas delivery systems and particle beam processing highlight his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving processes that are vital in various industrial applications.