Rinji Sugino

Title: Rinji Sugino: Innovator in Micro-Machining Technologies

Introduction

Rinji Sugino is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of micro-machining, holding a total of 4 patents. His innovative work focuses on enhancing the precision and efficiency of micro-machining processes.

Latest Patents

One of Sugino's latest patents is titled "Micro-machining minute hollow using native oxide membrane." This invention involves forming a native oxide film on a silicon substrate, which contains imperfect SiO.sub.2 regions. By etching the silicon substrate in a vapor phase through these regions, a hollow can be created with high controllability. Another notable patent is the "Dry cleaning process for cleaning a surface." This method effectively removes metal contaminants from an oxide film without causing substantial etching, utilizing a halide gas to achieve a clean surface.

Career Highlights

Rinji Sugino is currently employed at Fujitsu Corporation, where he continues to develop innovative technologies. His work has been instrumental in advancing micro-machining techniques, which are crucial for various applications in electronics and materials science.

Collaborations

Sugino has collaborated with notable colleagues, including Masaki Okuno and Yasuhisa Sato. Their combined expertise has contributed to the success of various projects and patents in the field.

Conclusion

Rinji Sugino's contributions to micro-machining technologies exemplify the spirit of innovation. His patents reflect a commitment to advancing the field and improving manufacturing processes.