Location History:
- Kanagawa, JP (2000 - 2002)
- Kawasaki, JP (2002)
Company Filing History:
Years Active: 2000-2002
Title: Inventor Spotlight: Rika Shinohara
Introduction
Rika Shinohara is a notable inventor based in Kanagawa, Japan, recognized for her contributions to the field of semiconductor technology. With three patents to her name, Rika is making a significant impact at Fujitsu Corporation, where she continues to innovate and push the boundaries of technology.
Latest Patents
Rika's latest patents reflect her expertise in forming specialized insulating films. One of her notable inventions is a semiconductor device and a method for forming an insulating film. This invention focuses on a method characterized by utilizing a Si supply gas, an oxygen supply gas, and a fluorine supply gas as material gases to form an insulating film with a low relative dielectric constant. The film is produced under specific conditions to ensure a density of 2.25 g/cm or more.
Another important patent involves a method of making a ferroelectric film with a protective cover film to guard against hydrogen and moisture. This innovative approach involves forming a ferroelectric film on a substrate and depositing an insulating protection film via high density plasma to prevent deterioration, showcasing Rika's commitment to enhancing the performance and longevity of semiconductor devices.
Career Highlights
At Fujitsu Corporation, Rika has established herself as a leading figure in semiconductor innovations. Her work not only enhances technology but also contributes to the company's reputation for excellence in research and development. Through her inventions, she has made significant strides in improving the functionality of electronic components.
Collaborations
Rika collaborates with talented individuals such as Hiroshi Kudo and Atsuhiro Tsukune, who are also esteemed professionals in the field. Their joint efforts in research and development enhance the innovative environment at Fujitsu Corporation, facilitating the growth of groundbreaking technologies.
Conclusion
Rika Shinohara's contributions to semiconductor technology and her innovative spirit underscores the importance of women in science and technology. As she continues to develop pioneering solutions, her work not only advances the field but also inspires future generations of inventors and innovators.