Richard S Smith

Title: Richard S. Smith: Innovator in Wafer Testing Technology

Introduction

Richard S. Smith, an accomplished inventor based in Harvard, MA, has made significant contributions to the field of semiconductor manufacturing. With a focus on enhancing measurement precision, he holds a patent for a groundbreaking system designed to improve wafer testing and calibration processes.

Latest Patents

His notable patent, titled "Wafer Testing and Self-Calibration System," presents a unique measurement station that rotates a wafer in a vertical plane. It features a scanning sensor that moves linearly along an axis parallel to the wafer's rotation plane, creating a spiral scan path across the wafer. This innovative design minimizes errors caused by weight-induced sagging, particularly in larger 300 mm wafers. Additionally, the measurement station is equipped with wafer grippers that secure the wafer in place during rotation. To enhance functionality, it incorporates master calibration gauges that simplify calibration processes, eliminating the need for calibration test wafers.

Career Highlights

Richard is affiliated with Ade Corp, where he applies his expertise in advancing wafer measurement technologies. His invention represents a significant leap in maintaining scan repeatability and reducing vibrations. The technique involves coasting the wafer during rotation and coordinating linear probe motions, which greatly enhances measurement accuracy. Early digitization of probe measurement data allows for efficient calibration, demodulation, filtering, and other digital processing.

Collaborations

Richard Smith's innovative efforts are bolstered by collaborations with talented colleagues in the industry. Noteworthy coworkers include Roy E. Mallory and Peter Domenicali, with whom he has likely exchanged ideas and technical insights to refine and improve wafer testing solutions.

Conclusion

With his innovative work on wafer testing and self-calibration systems, Richard S. Smith continues to make an impact in the semiconductor manufacturing sector. His patent not only demonstrates his ingenuity but also contributes to advancements that enhance efficiency and precision in wafer measurements. As technology continues to evolve, Richard's work stands as a testament to the importance of innovation in driving progress.