Company Filing History:
Years Active: 2014-2017
Title: Innovations by Richard J. Green: A Pioneer in Plasma Cleaning Technology
Introduction: Richard J. Green is an inventive mind based in Tracy, California, who has made significant contributions to the field of plasma cleaning technology. With two patents to his name, Green has focused on developing methods and apparatus that enhance the efficiency and effectiveness of deposition chambers used in various industrial applications.
Latest Patents: Richard J. Green's latest patents revolve around the innovative concept of "In Situ Plasma Clean for Removal of Residue from Pedestal Surface Without Breaking Vacuum." This technology provides a method for plasma cleaning a deposition chamber while maintaining the vacuum state. The process involves several key steps: positioning a substrate on a susceptor within the chamber, depositing a metal film on both the substrate and the deposition ring, grounding the metal film on the ring, and effectively removing contaminants using a plasma generated in the chamber. These patents highlight Green's commitment to advancing the operational efficiency of deposition processes without compromising their integrity.
Career Highlights: Throughout his career, Richard J. Green has been associated with Applied Materials, Inc., a leader in the semiconductor and display industries. His work primarily focuses on refining deposition methods, thereby improving the performance and reliability of materials used in advanced manufacturing processes.
Collaborations: In the course of his career, Green has collaborated with esteemed colleagues such as Cheng-Hsiung Matt Tsai and Shambhu Nath Roy. Together, they have explored innovative solutions and shared insights that push the boundaries of what is possible in semiconductor technology.
Conclusion: Richard J. Green's contributions to the field of in situ plasma cleaning not only demonstrate his ingenuity but also highlight the importance of continuous innovation in manufacturing processes. As technology rapidly evolves, the work of inventors like Green remains crucial to enhancing operational efficiencies and driving the future of industrial applications.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.