Company Filing History:
Years Active: 2008-2023
Title: Richard Gustav Hagborg: Innovator in Vapor Monitoring and Plasma Etching Technologies
Introduction
Richard Gustav Hagborg is a notable inventor based in Felton, California. He has made significant contributions to the fields of vapor monitoring and plasma etching technologies. With a total of 2 patents to his name, Hagborg's work has advanced the capabilities of process chambers in various applications.
Latest Patents
Hagborg's latest patents include innovative technologies that enhance the efficiency and effectiveness of monitoring processes. One of his patents focuses on a sensor assembly and methods of vapor monitoring in process chambers. This invention involves a process chamber with a substrate support and a sensor assembly that includes multiple apertures for sensor placement. This design allows for precise monitoring of film thickness during various processes.
Another significant patent by Hagborg is related to a plasma dielectric etch process that includes in-situ backside polymer removal for low-dielectric constant materials. This process begins with a workpiece that has a carbon-doped silicon oxide dielectric layer and a photoresist mask. The method introduces a fluoro-carbon based process gas while applying RF bias power to etch exposed portions of the dielectric layer. It also includes steps to remove previously deposited polymer from the backside of the workpiece, showcasing Hagborg's innovative approach to improving etching processes.
Career Highlights
Richard Hagborg is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to develop and refine technologies that are crucial for modern manufacturing processes.
Collaborations
Throughout his career, Hagborg has collaborated with talented individuals such as Gerardo Delgadino and Douglas A Buchberger, Jr. These collaborations have contributed to the successful development of his patented technologies.
Conclusion
Richard Gustav Hagborg is a distinguished inventor whose work in vapor monitoring and plasma etching has made a significant impact in the field. His innovative patents and contributions to Applied Materials, Inc. highlight his dedication to advancing technology in process chambers.