This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2000.
Company Filing History:
Years Active: 2000
Title: Richard E. Remmington: Innovator in Plasma Reactor Technology
Introduction
Richard E. Remmington is a notable inventor based in Fremont, CA (US). He has made significant contributions to the field of plasma technology, particularly through his innovative designs and patents. His work has implications for various applications in materials processing and semiconductor manufacturing.
Latest Patents
Richard E. Remmington holds a patent for a "Plasma reactor with multiple small internal inductive antennas." This invention employs a plurality of small inductive antennas to generate a processing plasma. In one embodiment, small coil antennas are secured within the chamber so that both of the pole regions of the antennas couple power to the plasma. The antennas may be oriented so that pole regions are anywhere from perpendicular to parallel to a chamber wall. The number, location, and orientation of the small antennas within the chamber may be selected to optimize plasma characteristics. Additionally, the antennas may be secured to the top, side, or bottom walls to improve plasma characteristics. Power deposition within the processing chamber may be adjusted by changing the orientation of the coils and the magnitude and phase relationship of RF power through the individual antennas. Process gas may be selectively delivered to areas of high power deposition, such as adjacent pole regions or through the center of a coil or loop antenna, to control plasma characteristics. In a preferred embodiment, the antennas are formed of a conductor surrounded by a non-sputtering, electrically insulating, thermally conductive jacket coupled to an electrically conductive chamber wall. The exposed surface of the jacket may be segmented to reduce eddy currents in conductive deposits.
Career Highlights
Richard E. Remmington is associated with Applied Materials, Inc., a leading company in the semiconductor and display technology sectors. His work at Applied Materials has allowed him to contribute to advancements in plasma processing technologies.
Collaborations
Some of his notable coworkers include Yan Ye and Yeuk-Fai Edwin Mok, who have collaborated with him on various projects related to plasma technology.
Conclusion
Richard E. Remmington's innovative work in plasma reactor technology showcases his expertise and commitment to advancing the field. His contributions continue to influence the development of efficient processing techniques in the semiconductor industry.