Company Filing History:
Years Active: 2005
Title: Richard Ciari: Innovator in Semiconductor Cleaning Technology
Introduction
Richard Ciari is a notable inventor based in Santa Clara, California. He has made significant contributions to the field of semiconductor technology, particularly in the cleaning and drying processes of semiconductor wafers. His innovative approach has led to the development of a unique patent that enhances the efficiency and effectiveness of wafer preparation.
Latest Patents
Richard Ciari holds a patent for a "Cleaning and drying method and apparatus." This patent outlines a comprehensive method for cleaning semiconductor wafers before epitaxial deposition. The process includes several steps: etching silicon wafers with HF, rinsing with ozonated ultrapure water, treating with dilute SC1, and further rinsing. The method culminates in drying the wafers with nitrogen and a trace amount of IPA, all conducted within a single dryer chamber without removing the wafers between steps. This innovative system also features a single tank designed for cleaning, etching, rinsing, and drying wafers, with the capability to inject HF into a DI water stream.
Career Highlights
Richard Ciari is currently employed at Akrion, LLC, where he continues to advance semiconductor cleaning technologies. His work has been instrumental in improving the processes that are critical to the semiconductor manufacturing industry. His patent reflects his commitment to innovation and excellence in this highly technical field.
Collaborations
Richard has collaborated with several talented individuals in his field, including Ismail Kashkoush and Gim-Syang Chen. These collaborations have likely contributed to the development and refinement of his patented technologies.
Conclusion
Richard Ciari's contributions to semiconductor cleaning technology exemplify the spirit of innovation in the industry. His patented methods not only enhance the cleaning process but also streamline operations, showcasing the importance of continuous improvement in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.