Fort Collins, CO, United States of America

Richard A Scholl



Average Co-Inventor Count = 1.8

ph-index = 12

Forward Citations = 597(Granted Patents)


Company Filing History:


Years Active: 1998-2007

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14 patents (USPTO):Explore Patents

Title: Innovations of Richard A Scholl

Introduction

Richard A Scholl is a notable inventor based in Fort Collins, Colorado. He has made significant contributions to the field of sputter deposition technology, holding a total of 14 patents. His work focuses on enhancing the efficiency and effectiveness of sputtering processes used in various applications.

Latest Patents

One of his latest patents is titled "Dual anode AC supply for continuous deposition of a cathode material." This invention provides an apparatus for sputter deposition of an insulating material in a continuous mode of operation. It utilizes at least two sputtering anodes and a cathode connected to a center-tapped conductor to maintain the target cathode at a negative potential with respect to the plasma. The AC power supply drives each anode alternately to an ion collecting state to attract ions and an electron collecting state to attract electrons, ensuring efficient sputtering.

Another significant patent is the "Method and apparatus for substrate biasing in multiple electrode sputtering systems." This invention discloses a method and apparatus for causing ion bombardment of the substrate during sputter deposition. It includes a novel electrical circuit with a center-tapped transformer, allowing a controllable potential to be applied to the substrate relative to the plasma potential without needing an additional power supply. This innovation enhances the sputtering process by enabling continuous discharging of the surface through alternate ion and electron bombardment.

Career Highlights

Richard A Scholl is currently employed at Advanced Energy Industries, Inc., where he continues to develop innovative technologies in the field of sputtering. His extensive experience and expertise have positioned him as a key figure in advancing sputter deposition techniques.

Collaborations

Throughout his career, Richard has collaborated with notable colleagues, including Geoffrey N Drummond and David J Christie. These collaborations have contributed to the development of cutting-edge technologies in the industry.

Conclusion

Richard A Scholl's contributions to sputter deposition technology through his patents and innovations have significantly impacted the field. His work continues to influence advancements in material deposition processes, showcasing his dedication to innovation.

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