Sagamihara, Japan

Reiichiro Sensui


Average Co-Inventor Count = 6.0

ph-index = 1

Forward Citations = 98(Granted Patents)


Company Filing History:


Years Active: 1987

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1 patent (USPTO):Explore Patents

Title: Reiichiro Sensui: Innovator in Semiconductor Device Production

Introduction

Reiichiro Sensui is a notable inventor based in Sagamihara, Japan. He has made significant contributions to the field of semiconductor device production, holding a patent that showcases his innovative approach to manufacturing processes.

Latest Patents

Sensui's patent, titled "Apparatus for producing semiconductor devices," involves a sophisticated apparatus designed to enhance the efficiency of semiconductor wafer treatments. This apparatus features a series of interconnected treatment chambers, including a load chamber, etching chamber, sputtering chamber, ion implantation chamber, CVD chamber, unload chamber, transfer chamber, heat-treatment chamber, and rinsing chamber. The design allows for various treatments of semiconductor wafers, with a wafer conveyor and transfer means that facilitate the movement of wafers through these chambers. Notably, the system is reversible, enabling wafers to be returned to the inlet for dust detection. The heat-treatment chamber employs a unique method of applying hot air and contact heating to ensure uniform treatment in a short time frame. Additionally, the inner surfaces of the etching chamber are lined with detachable aluminum linings for easier maintenance.

Career Highlights

Throughout his career, Reiichiro Sensui has worked with prominent companies, including Toshiba Corporation and Tokuda Seisakusho. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.

Collaborations

Sensui has collaborated with notable colleagues such as Shigeki Hazano and Masahiro Shibagaki, further enhancing his contributions to the field.

Conclusion

Reiichiro Sensui's work in semiconductor device production exemplifies the spirit of innovation in technology. His patent reflects a commitment to improving manufacturing processes, making significant strides in the semiconductor industry.

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