Regis Joseph Kline

Title: The Innovations of Regis Joseph Kline

Introduction

Regis Joseph Kline is an accomplished inventor based in Boonsboro, MD (US). He has made significant contributions to the field of semiconductor devices, particularly in the characterization of high aspect ratio structures. His innovative work has led to the development of methods that enhance the understanding and analysis of these complex structures.

Latest Patents

Kline holds a patent titled "Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering." This patent provides methods and apparatus for characterizing high aspect ratio (HAR) structures of fabricated or partially fabricated semiconductor devices. The methods involve using small angle X-ray scattering (SAXS) to determine average parameters of an array of HAR structures. In some implementations, SAXS is used to analyze the symmetry of HAR structures in a sample and may be referred to as tilted structural symmetry analysis-SAXS (TSSA-SAXS) or TSSA. Analysis of parameters such as tilt, sidewall angle, bowing, and the presence of multiple tilts in HAR structures may be performed.

Career Highlights

Throughout his career, Kline has worked with notable organizations, including Lam Research Corporation and the Government of the United States of America, as represented by the Secretary of Commerce. His expertise in semiconductor technology has positioned him as a valuable asset in the industry.

Collaborations

Kline has collaborated with esteemed colleagues such as William Dean Thompson and Daniel F Sunday. Their combined efforts have contributed to advancements in semiconductor research and development.

Conclusion

Regis Joseph Kline's innovative work in semiconductor technology and his patent on high aspect ratio structures demonstrate his significant impact on the field. His contributions continue to influence the development of advanced semiconductor devices.