Location History:
- Hayward, CA (US) (2002 - 2004)
- Campbell, CA (US) (2002 - 2004)
Company Filing History:
Years Active: 2002-2004
Title: The Innovative Contributions of Rebecca Faller
Introduction
Rebecca Faller is a prominent inventor based in Hayward, California. She has made significant contributions to the field of chemical vapor deposition processes, holding a total of 6 patents. Her work focuses on the abatement of effluents generated during these processes, showcasing her commitment to environmental sustainability and innovation.
Latest Patents
Among her latest patents is the invention titled "Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions." This patent describes an apparatus and method for effectively treating effluents from multi-component metal oxides deposited by chemical vapor deposition (CVD) processes. The invention utilizes metal coordination complexes and suitable solvent mediums to remove precursor species and by-products from the effluent. Another notable patent is "Abatement of effluents from chemical vapor deposition processes using organometallic source reagents." This invention outlines a method and apparatus for abating effluents from CVD processes, particularly focusing on copper deposition processes. The high-efficiency abatement process is designed to utilize specific source reagents, enhancing the overall effectiveness of the treatment.
Career Highlights
Rebecca Faller is currently employed at Advanced Technology Materials, Inc., where she continues to develop innovative solutions in her field. Her expertise in chemical vapor deposition processes has positioned her as a key figure in advancing technologies that address environmental concerns.
Collaborations
Throughout her career, Rebecca has collaborated with notable colleagues, including Mark R Holst and Glenn M Tom. These partnerships have contributed to her success and the development of her groundbreaking inventions.
Conclusion
Rebecca Faller's contributions to the field of chemical vapor deposition processes highlight her innovative spirit and dedication to environmental sustainability. Her patents reflect her expertise and commitment to advancing technology in a responsible manner.